C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdTpc-Gases - Noble SEMI MF1451 — Test Method

SEMI MF1451 — Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning

org in March 2003

Using polystyrene latex spheres (PSL) as a filter challenge does not work at the 5 to 15 m size range because the PSL size distribution is too broad and using white spherical plastic beads is an unrealistic challenge for filter testing

The purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified

The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded)

C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdTpc-Gases - Noble SEMI MF1451 — Test MethodNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals