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C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI C92-0216 - Replaced SEMI C31-0699 (first published -

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Description

SEMI C31-0699 (first published - replaces SEMI C1

1-Trichlorethane

and wafer to wafer stacking

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the end user should determine which analyses are required and whether to conduct optional testing

C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI C92-0216 - Replaced SEMI C31-0699 (first published -NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F119. The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing

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