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Referenced Standards (purchase separately)
本方法において定義されるチューブは，管状の形をしており，PFA材質でできている。
SEMI 3D12-1020 (technical revision)
This Guide was developed to support the proactive quality management approach
the cylinder pressure will drop rather rapidly
C03500 - SEMI C35 - Specification and Guide for Nitric Acid Revision:SEMI C35-0301 - Superseded Referenced Standards (purchase separately)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give