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SEMI E79-0814 (complete rewrite)
and Flatness of Bonded Wafer Stacks
multiple blocks are stacked as a box and shipped boxes together in a test specimen
may be used for process control
出荷管理 (STC) 限界を規定および維持する目的で，プロセスデータから統計的に導かれる限界値を定量的に決定するためのガイドラインを提示する。
F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS) Revision:SEMI F33-0708 - Inactive SEMI E79-0814 (complete rewrite)This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in June 2008. Originally published in 1998. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and
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